Laser slicing machine
CH002

Substrate Laser Slicing Equipment Non-Contact Precision Slicing System

The laser slicing equipment is an advanced laser-based system designed to segment SiC ingots into substrate wafers. It is suitable for processing 6-to-12-inch SiC products. Leveraging high-performance lasers and precision optical systems, the equipment significantly reduces the modified layer thickness during cutting, effectively minimizing potential impacts on the subsequent performance of the wafers. Compared to traditional wire cutting processes, this technology markedly enhances processing efficiency and increases production capacity. Furthermore, it can be integrated with thinning equipment to form an automated production line for combined laser slicing and thinning.

Inquiry
Performance Parameters

Operation Mode

Automatic / Semi-Automatic

Stealth Slicing Range

6-inch/8-inch

Chuck

Micro-porous Ceramic Chuck with blowing/vacuum functions
Max. X-Axis Speed1000mm/s
Max. Y-Axis Speed800mm/s
Laser Source

10,000 hours guaranteed stable operation

Vision System

Low-magnification vision camera、Panoramic recognition & height-measurement camera、
Automatic focus targeting for custom-area stealth slicin
Dimensions (W×D×H)

1400mm×1150mm×1800mm

Equipment Weight

Approx. 1500 kg

行业挑战
硬脆材料精密切割面临关键瓶颈:
01.机械损伤风险
传统切割导致崩边与隐裂
02.热影响扩散
加工热累积影响材料性能
03.薄片加工局限
超薄晶圆碎裂率高
04.安全环保压力
化学污染与设备噪音
行业挑战
Core Advantages
Core Advantages
Zero-Contact slicing
Non-contact process eliminates physical contact, preventing material damage and contamination.
Micron-Level Precision
High-precision slicing paths (≤20µm), smooth cut surfaces, chip-free edges.
High Speed & Quality
High-efficiency cutting speed, especially suitable for hard materials.
Ultra-Thin & Non-Destructive
Minimal material waste, low kerf loss, ideal for ultra-thin wafers.
Multi-Material Compatibility
Compatible with diverse materials and sizes, highly adaptable.
No Post-slicing Cleaning Required
Eliminates cleaning steps, suitable for sensitive materials.
Intelligent Automation
Supports fully automated operation with high-precision positioning and visual recognition.
Stable & Low Opex
Stable operation with low maintenance costs.
Zero-Contact slicing
Non-contact process eliminates physical contact, preventing material damage and contamination.
Micron-Level Precision
High-precision slicing paths (≤20µm), smooth cut surfaces, chip-free edges.
High Speed & Quality
High-efficiency cutting speed, especially suitable for hard materials.
Ultra-Thin & Non-Destructive
Minimal material waste, low kerf loss, ideal for ultra-thin wafers.
Multi-Material Compatibility
Compatible with diverse materials and sizes, highly adaptable.
No Post-slicing Cleaning Required
Eliminates cleaning steps, suitable for sensitive materials.
Intelligent Automation
Supports fully automated operation with high-precision positioning and visual recognition.
Stable & Low Opex
Stable operation with low maintenance costs.
Advantages
成功实证
国内头部SiC衬底制造商
挑战
传统刀轮切割崩边率>12%
80μm超薄晶圆碎裂率>18%
化学清洗导致材料污染
方案
导入衬底激光成片设备
启用 晶锭分级切割策略 + 热管理实时监控模块
成果
崩边率趋近于零(行业领先水平)
80μm晶圆碎裂率下降至可忽略范围
单片加工成本显著优化(节省清洗耗材+良率提升)
No. 258 Chouqin Road, Shihudang Town Songjiang District, Shanghai
+86 21 38112058 ext. 8140

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