Thinning machine
MSG1611
MDG1423
MIG1423
MDG1623
MTG1634

12-Inch Single-Spindle Thinning Equipment

The equipment adopts semi-automatic processing with manual loading and is applicable to various semiconductor hard and brittle materials including Si, SiC, GaN, sapphire, and ceramics. It processes products ranging from 2 to 12 inches with support for custom non-standard sizes, offering wide applicability and high compatibility. Featuring a compact structure, simple operation, and comprehensive functionality, the system incorporates a closed-loop thickness control system, making it suitable for various application scenarios such as universities, research institutes, and small-batch sample processing.

8" Dual-Spindle Wafer Thinning Machine

This system employs a dual-spindle three-table design equipped with automatic transfer, centering and edge-finding, cleaning and spin-drying, and closed-loop thickness control functions. It enables fully automated processing of various 4-8 inch wafers including Si/SiC/GaAs/Ge wafers. Specifically for third-generation semiconductor ultra-hard materials like SiC, the equipment provides unique thinning solutions utilizing high-power, high-rigidity, low-vibration air spindles combined with innovative grinding technology, low-stress processes, and high-precision control systems to achieve efficient and low-damage thinning of SiC materials.

8" Dual-Spindle Ingot Thinning Machine

Designed specifically for thinning ultra-hard material crystals such as SiC, this premium equipment features a dual-spindle three-table configuration with specially designed automation components and thickness measurement modules, enabling fully automated processing of 4-8 inch ultra-thick crystals.

12" Dual-Spindle Thinning Machine

The system incorporates a dual-spindle three-table design with functions including automatic transfer, centering and edge-finding, cleaning and spin-drying, and closed-loop thickness control. It supports fully automated processing of various 6-12 inch wafers including Si/SiC/GaAs/Ge wafers. For third-generation semiconductor ultra-hard materials like SiC, the equipment offers specialized thinning solutions using high-power, high-rigidity, low-vibration air spindles in combination with innovative grinding technology, low-stress processes, and high-precision control systems to accomplish efficient and low-damage thinning of SiC materials.

12" Triple-Spindle Thinning Machine

Featuring a triple-spindle four-table design, the equipment includes automatic transfer, centering and edge-finding, cleaning and spin-drying, and closed-loop thickness control capabilities. It enables fully automated processing of various 6-12 inch wafers including Si/SiC/GaAs/Ge wafers. Particularly for third-generation semiconductor ultra-hard materials like SiC, the system provides unique thinning solutions employing high-power, high-rigidity, low-vibration air spindles integrated with innovative grinding technology, low-stress processes, and high-precision control systems to realize efficient and low-damage thinning of SiC materials.

Inquiry
Performance Parameters
Wafer SizeΦ6,Φ8,Φ12Number of Worktable1
Spindle Power  

7.5KW/11KW

Worktable MovementIndex rotary typeGrinding Wheel SpecΦ300 mm Diamond grinding wheelThickness MeasurementIPG
Number of Spindles1Online Thickness Range0~1800 μm or 0~50 mm (optional)
Wafer SizeΦ4~Φ8Number of Worktable3
Worktable MovementIndex rotary typeGrinding Wheel SpecΦ200/Φ300 mm Diamond grinding wheel
Thickness MeasurementIPGNumber of Spindles2
Online Thickness Range0~1800um
Wafer SizeΦ4~Φ8Number of Worktable3Worktable MovementIndex rotary type
Grinding Wheel SpecΦ300 mm Diamond grinding wheelThickness MeasurementIPGNumber of Spindles2
Online Thickness Range0~50mm

Wafer SizeΦ6~Φ12Number of Worktable3Worktable MovementIndex rotary type
Grinding Wheel SpecΦ300 mm Diamond grinding wheelThickness MeasurementIPGNumber of Spindles2
Online Thickness Range0~1800um

Wafer SizeΦ6~Φ12Number of Worktable4Worktable MovementIndex rotary type
Grinding Wheel SpecΦ300 mm Diamond grinding wheelThickness MeasurementIPGNumber of Spindles3
Online Thickness Range0~1800um

行业挑战
传统减薄设备在加工超高硬度(莫氏硬度的SiC 材料时面临诸多局限:
01.性能瓶颈
设备刚性不足,难以高效处理 SiC
02.损伤控制
易引入微裂纹和亚表面损伤,影响器件良率与可靠性。
03.均匀性难题
晶圆翘曲与 TTV(总厚度变化)控制困难,
导致工艺波动和性能差异。
04.碎片风险
SiC 脆性大,尤其在薄化阶段,易破裂造成损失。
05.成本压力
效率低、砂轮损耗高、碎片率高等因素推高综合成本。
行业挑战
Core Advantages
Core Advantages
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Semi-Auto Convenience
Manual Loading/Unloading, Semi-Automatic System, User-Friendly Operation
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent TTV/Roughness
Superior TTV and Roughness
Multi-Size Universal Compatibility
It is capable of processing 2-12 inch wafers and supports non-standard customized specifications.
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Semi-Auto Convenience
Manual Loading/Unloading, Semi-Automatic System, User-Friendly Operation
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent TTV/Roughness
Superior TTV and Roughness
Multi-Size Universal Compatibility
It is capable of processing 2-12 inch wafers and supports non-standard customized specifications.
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing.
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent TTV/Roughness
Superior TTV and Roughness
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing.
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent TTV/Roughness
Superior TTV and Roughness
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Automated Ingot Processing
Enables Fully Automated Dry-In/Dry-Out Processing for Ingots
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent Profile/Roughness
Superior Surface Profile Control and Roughness Parameters
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Automated Ingot Processing
Enables Fully Automated Dry-In/Dry-Out Processing for Ingots
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Excellent Profile/Roughness
Superior Surface Profile Control and Roughness Parameters
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Multi-Size Wafer Compatibility
Equipment Compatible with 6"-12" Wafers
Excellent TTV/Roughness
Superior TTV and Roughness
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Multi-Size Wafer Compatibility
Equipment Compatible with 6", 8", 12" Wafers
Excellent TTV/Roughness
Superior TTV and Roughness
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Multi-Size Wafer Compatibility
Equipment Compatible with 6"-12" Wafers
Excellent TTV/Roughness
Superior TTV and Roughness
3-Spindle High-Efficiency Machining
2 Roughing + 1 Finishing, Suitable for Backside Thinning of Thick Devices with Large Removal Volumes, Improving Processing Efficiency
Precision Stress-Free Base
High-Precision Stress-Free Casting Base
Rigid Low-Vibe Spindle
High-Rigidity, High-Power, Low-Vibration Air Spindle
Fully automatic processing
Dry-In/Dry-Out Fully Automatic System
Real-Time Monitoring
Real-Time Monitoring of Key Processing Parameters
Multi-Size Wafer Compatibility
Equipment Compatible with 6"-12" Wafers
Excellent TTV/Roughness
Superior TTV and Roughness
3-Spindle High-Efficiency Machining
2 Roughing + 1 Finishing, Suitable for Backside Thinning of Thick Devices with Large Removal Volumes, Improving Processing Efficiency
Advantages
成功案例
行业领先 SiC 衬底企业
挑战
原有设备效率低,TTV 控制不佳(3~5μm)。
方案
导入 MDG423 设备并进行工艺优化。
成果
单片加工时间缩短 25%。
8 英寸衬底片 TTV 稳定控制在 2μm 以内。
客户良率提升约 8%。
No. 258 Chouqin Road, Shihudang Town Songjiang District, Shanghai
+86 21 38112058 ext. 8140

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